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Research article

First published 2024-8

Deep reinforcement learning-assisted extended state observer for run-to-run control in the semiconductor manufacturing process

Zhu Ma, Tianhong Pan

Transactions of the Institute of Measurement and Control

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Research article

First published 2024-01-10

Fault diagnosis in semiconductor manufacturing processes using a CNN-based generative adversarial network 1

Palanichamy Naveen, S. NithyaSai, Venkateshkumar Udayamoorthy [...]

Journal of Intelligent & Fuzzy Systems: Applications in Engineering and Technology

Open access

Research article

First published 2017-7

A monitoring method of semiconductor manufacturing processes using Internet of Things–based big data analysis

Seok-Woo Jang, Gye-Young Kim

International Journal of Distributed Sensor Networks

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Research article

First published 2025-5

A clustering-aided multi-agent deep reinforcement learning for multi-objective parallel batch processing machines scheduling in semiconductor manufacturing

Peng Zhang, Mengyu Jin, Ming Wang [...]

Measurement and Control

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Research article

First published 2000-12

COMBINED PRODUCTION AND MAINTENANCE SCHEDULING FOR A MULTIPLE‐PRODUCT,SINGLE‐ MACHINE PRODUCTION SYSTEM

THOMAS W. SLOAN, J. GEORGE SHANTHIKUMAR

Production and Operations Management

Open access

Research article

First published 2024-6

Control theory for skewed distribution under operation side of the telecommunication industry and hard-bake process in the semiconductor manufacturing process

Azam Zaka, Riffat Jabeen, Mashhood Ahmad [...]

Measurement and Control

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Research article

First published 2023-8

Emission and occupational health risk assessment of harmful contaminants in various processes in a typical semiconductor manufacturing industry building

Xianglan Zhang, Zhichao Wang, Xiaofeng Li [...]

Indoor and Built Environment

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Research article

First published 1997-03

MINIMIZING TOTAL WEIGHTED COMPLETION TIME ON A SINGLE BATCH PROCESSING MACHINE

Reha Uzsoy, Yaoyu Yang

Production and Operations Management

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Research article

First published 2017-8

Industrial big data–based scheduling modeling framework for complex manufacturing system

Xuechu Zhu, Fei Qiao, Qiushi Cao

Advances in Mechanical Engineering

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Research article

First published 1999-9

Knowledge acquisition from batch semiconductor manufacturing data

Ma. Dolores del Castillo Sobrino, Luis J. Barrios Bravo

Intelligent Data Analysis: An International Journal

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