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Research article

First published 2022-8

Friction-induced instability and vibration in a precision motion stage with a friction isolator

Jiamin Wang, Xin Dong, Oumar R Barry [...]

Journal of Vibration and Control

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Research article

First published 2012-10

Nonlinear iterative learning control applied to an aerostatic X – Y planar motion stage

Dongdong Yu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2016-4

Adaptive fuzzy trajectory control for biaxial motion stage system

Wei-Lung Mao, Chung-Wen Hung, Suprapto

Advances in Mechanical Engineering

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Research article

First published 2015-5

Design of a linear macro–micro actuation stage considering vibration isolation

Lufan Zhang, Zhili Long, Jiandong Cai [...]

Advances in Mechanical Engineering

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Research article

First published 2016-11

Iterative tuning notch filter for suppressing resonance in ultra-precision motion control

Wei Teng, Xiaolong Zhang, Yangyang Zhang [...]

Advances in Mechanical Engineering

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Research article

First published 2014-10

A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage

Dongdong Yu, Yu Zhu, Kaiming Yang [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2006-5

Fabrication Error Sensitivity Analysis of Three-Degree-Of-Freedom Parallel Submicron Positioning Stage

S-L Chen, Y-C Huang, M Tomizuka

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2021-5

Variable step control to improve scanning speed of gene sequencing stage

Xiaohua Zhou, Jianbin Zheng, Xiaoming Wang [...]

Measurement and Control

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Research article

First published 2007-1

Design analysis and experimental study of aerostatic linear guideways used in a high acceleration and high precision xy stage

Y. T. Li, H Ding

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2018-8

Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

Sen Lu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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