Sage Journals: Discover world-class research

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Research article

First published 2010-9

Three-dimensional nanoimprint lithography using photocurable resins

J. Taniguchi, N. Unno, Y. Kamiya [...]

Plastics,Rubber and Composites: Macromolecular Engineering

Free access

Research article

First published 2009-1

Strategy for a loading force induced overlay position shift in step imprint lithography

J Y Shao, Y C Ding, H Z Liu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2004-6

Fabrication of large-area stamps,moulds,and conformable photomasks for soft lithography

H. H. Lee, E Menard, N. G. Tassi [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

Open access

Research article

First published 2024-7

A temperature control algorithm for lithography machine based on generalized predictive control and BP neural network PI control

Zhou Lan, Jingsong Chen, Cheng Xue [...]

Measurement and Control

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Other

First published 2011-4

Automated Scanning Probe Lithography with n -Alkanethiol Self-Assembled Monolayers on Au(111): Application for Teaching Undergraduate Laboratories

Treva T. Brown, Zorabel M. LeJeune, Kai Liu [...]

Journal of Laboratory Automation

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Research article

First published 2013-6

Antireflection characteristics of inverted nanopyramid arrays fabricated by low-cost nanosphere lithography technology

Junfeng Wang, Peitao Dong, Di Di [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2001-12

Overview of Modern Lithography Techniques and a MEMS-Based Approach to High Throughput Rate Electron Beam Lithography

J. Geoffrey Chase, Bram W. Smith

Journal of Intelligent Material Systems and Structures

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Research article

First published 2020-2

Typography-Like 3D-Printed Templates for the Lithography-Free Fabrication of Microfluidic Chips

Wenqiong Su, Yulong Li, Lulu Zhang [...]

Journal of Laboratory Automation

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Research article

First published 2012-2

Monolithic design of a compliant template orientation stage for step imprint lithography

J-Y Shao, Y-C Ding, H-Z Liu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2018-8

Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

Sen Lu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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