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First published 2024-01-10

Fault diagnosis in semiconductor manufacturing processes using a CNN-based generative adversarial network 1

Palanichamy Naveen, S. NithyaSai, Venkateshkumar Udayamoorthy [...]

Journal of Intelligent & Fuzzy Systems: Applications in Engineering and Technology

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Research article

First published 2020-2

Transient uniformity model predictive control in dealing with non-uniformity of multivariable systems

XiaoQiong Wang, Atilla Incecik, Zhixiong Li [...]

Proceedings of the Institution of Mechanical Engineers,Part M: Journal of Engineering for the Maritime Environment

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Research article

First published 1999-9

Knowledge acquisition from batch semiconductor manufacturing data

Ma. Dolores del Castillo Sobrino, Luis J. Barrios Bravo

Intelligent Data Analysis: An International Journal

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Research article

First published 2017-8

Industrial big data–based scheduling modeling framework for complex manufacturing system

Xuechu Zhu, Fei Qiao, Qiushi Cao

Advances in Mechanical Engineering

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Research article

First published 2017-7

A monitoring method of semiconductor manufacturing processes using Internet of Things–based big data analysis

Seok-Woo Jang, Gye-Young Kim

International Journal of Distributed Sensor Networks

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Research article

First published 2017-7

A dispatching method for the lots of different priorities in 450-mm semiconductor manufacturing

CN Wang, Jing-Wein Wang, Min-Tsong Chou [...]

Advances in Mechanical Engineering

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Research article

First published 2019-1

A slack optimization unified model of regrouping and sequencing batches for β 1 → β 2 manufacturing system

Wenyou Jia, Hao Chen, Li Liu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2010-8

Establishing the optimal and efficient capacity re-allocation plans for enhancing the long-term competitiveness of a semiconductor product — a long-term trend viewpoint

T Chen

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2019-1

Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks

Kesheng Wang, Yijia Lu, Jia Cheng [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2021-5

Task failure prediction for wafer-handling robotic arms by using various machine learning algorithms

Ping Wun Huang, Kuan-Jung Chung

Measurement and Control

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