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Research article

First published 2016-8

Dynamic modeling method for air bearings in ultra-precision positioning stages

Xiulan Bao, Jincheng Mao

Advances in Mechanical Engineering

Open access

Research article

First published 2017-4

Fabrication of large-scale micro-structures by two-photon polymerization with a long-stroke precision stage

Fu-Cheng Wang, Kuo-An Wang, Tien-Tung Chung [...]

Advances in Mechanical Engineering

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Research article

First published 2022-8

Friction-induced instability and vibration in a precision motion stage with a friction isolator

Jiamin Wang, Xin Dong, Oumar R Barry [...]

Journal of Vibration and Control

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Research article

First published 2012-7

Optimization of a phase stabilization controller for an ultra-precision positioning stage using a structured genetic algorithm

Jin Yang, Yu Zhu, Wensheng Yin [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2019-03-16

Intelligent control and performance evaluation of a novel precise positioning stage

Guang-Qing Lu, Audrius Čereška, Giedrius Augustinavičius [...]

Journal of Intelligent & Fuzzy Systems: Applications in Engineering and Technology

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Research article

First published 2010-4

Robust design of a novel three-axis fine stage for precision positioning in lithography

D-J Lee, K Kim, K-N Lee [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2006-8

Note on stratified two-stage sampling under precision constraints

Marcin Kozak

Model Assisted Statistics and Applications

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Research article

First published 2014-10

A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage

Dongdong Yu, Yu Zhu, Kaiming Yang [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2018-8

Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

Sen Lu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2017-3

Repetitive model predictive control for precise control of complex trajectory tracking in dual-stage actuator systems

Chi-Ying Lin, Chih-Yuan Chang

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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