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Research article

First published 2023-5

Study of metal-assisted chemical etching of silicon as an alternative to dry etching for the development of vertical comb-drives

Varun P. Sharma, Rahul Shukla, C. Mukherjee [...]

Journal of Micromanufacturing

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Research article

First published 2004-10

Numerical studies of variations in the gap and finger width ratio and travelled distance for the driving force of a radio-frequency microelectromechanical system device using the dual boundary element method

Y-S Liao, S-W Chyuan, J-T Chen

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 1998-04

Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design

Michel A. Rosa, Sima Dimitrijev, H. Barry Harrison

Journal of Intelligent Material Systems and Structures

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Research article

First published 2011-1

Experimental Measurement of Resonance Frequencies of Asymmetric Micro-bridge Resonators

Pezhman A. Hassanpour, William L. Cleghorn, Ebrahim Esmailzadeh [...]

Journal of Intelligent Material Systems and Structures

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Research article

First published 2013-9

Optimal shape design of electrostatic microactuators: A multiobjective formulation

R. Chereches, P. Di Barba, V. Topa [...]

International Journal of Applied Electromagnetics and Mechanics

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Research article

First published 2010-7

Analysis on the adhesion of micro-comb structure in MEMS

Haipeng Liu, Shiqiao Gao, Shaohua Niu [...]

International Journal of Applied Electromagnetics and Mechanics

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Research article

First published 2014

Single-Sided Electromagnetic Induction Heating Based on IGBT

Song Wang, Guangda Li, Xiaokun Li

Advances in Mechanical Engineering

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Review article

First published 2022-10

Study on the safety speed of vehicle turning with considering the driving safety evaluation

Qu Xian, Yu Feng, Zhang Jinlong [...]

Proceedings of the Institution of Mechanical Engineers,Part D: Journal of Automobile Engineering

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Research article

First published 2023-8

Analysis of electret-based vibration energy harvesting devices with curved-beam hinges

Dooyoung Hah

Journal of Intelligent Material Systems and Structures

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Research article

First published 2015-12

Design of a microelectromechanical systems resonant electric field sensor with sensitivity robustness

Heng Liu, Jia-qi Xu, Feng Xiong [...]

Advances in Mechanical Engineering

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