Study of metal-assisted chemical etching of silicon as an alternative to dry etching for the development of vertical comb-drives

Abstract

Metal-assisted chemical etching (MaCEtch) has recently emerged as a promising technique to etch anisotropic nano- and microstructures in silicon by metal catalysts. It is an economical wet chemical etching method, which can be a good alternative to deep-reactive ion etching (DRIE) process in terms of verticality and etch depth. In the present study, gold is used as a metal catalyst and deposited using physical vapour deposition. It has already been demonstrated that (100) p-type Si wafer can be etched with vertical and smooth side walls. Effects of varying concentrations of etchant constituents and various other parameters, that is, porosity of deposited Au, surface contaminants, oxide formation, metal catalyst, etching time, role of surface tension of additives on the etch depth and surface defects are studied and discussed in detail. By increasing the hydrofluoric acid (HF) concentration from 7.5 M to 10 M, lateral etching is reduced and the microstructure’s width is increased from 17 µm to 18 µm. Porous defects are suppressed by decreasing the hydrogen peroxide (H₂O₂) concentration from 1.5 M to 1 M. On increasing the etching time from 30 min to 60 min, the microstructures are over-etched laterally. Smoother side walls are fabricated by using the low-surface-tension additive ethanol. The maximum etch depth of 2.6 µm is achieved for Au catalyst in 30 min. The results are encouraging and useful for the development of vertical comb-drives and Micro-Electro-Mechanical Systems (MEMS).