Experimental Measurement of Resonance Frequencies of Asymmetric Micro-bridge Resonators

Abstract

The experiment results on the resonance frequencies of micro-bridge resonators with attached electrostatic comb-drives are reported in this article. The resonators include a novel design of asymmetric resonators, in which the comb-drives are attached to off-midpoint of the beam. The experiment results confirm that by properly designing the location and mass of the comb-drives, the natural frequencies can exceed those of conventional symmetric resonators. Moreover, it has been shown that the second mode of vibration of asymmetric resonators, in contrast to that of symmetric resonators, can be excited, hence exploited for applications in which multiple working frequencies are desired. The experiment results are in good agreement with the analytical model. The deviations between these two are discussed in detail.

Keywords

microelectromechanical systems asymmetric resonator beam-mass system.

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References

ASM International Handbook Committee (ASM). 2000. Engineered Materials Handbook, ASM International, OH, USA.

Azevedo, R.G. , Jones, D.G. , Jog, A.V. , Jamshidi, B. , Myers, D.R. , Chen, L. , Fu, X.A. , Mehregany, M. , Wijesundara, M.B.J. and Pisano, A.P. 2007. "A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications," IEEE Sensors Journal, 7:568-576.

Bahreyni, B. and Shafai, C. 2007. "Oscillator and Frequency-Shift Measurement Circuit Topologies for Micromachined Resonant Devices," Sensors and Actuators A-Physical, 137:74-80.

Batra, R.C. , Porfiri, M. and Spinello, D. 2007. "Review of Modeling Electrostatically Actuated Microelectromechanical Systems," Smart Materials and Structures , 16:R23-R31.

Batra, R.C. , Porfiri, M. and Spinello, D. 2008. "Vibrations of Narrow Microbeams Predeformed by an Electric Field," Journal of Sound and Vibration, 309:600-612.

Beeby, S.P. , Ensell, G. , Baker, B.R. , Tudor, M.J. and White, N.M. 2000. "Micromachined Silicon Resonant Strain Gauges Fabricated Using SOI Wafer Technology," Journal of Microelectromechanical Systems, 9:104-111.

Hassanpour, P.A. , Cleghorn, W.L. , Esmailzadeh, E. and Mills, J.K. 2007a. "Vibration Analysis of Micro-machined Beam-type Resonators ," Journal of Sound and Vibration, 308:287-301.

Hassanpour, P.A. , Cleghorn, W.L. , Esmailzadeh, E. and Mills, J.K. 2007b. "Vibration Analysis of Axially Loaded Euler-Bernoulli Beams with Guided Mass," In: Proceedings of the ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/ CIE 2007, 4-7 September, Las Vegas, NV, USA.

Hassanpour, P.A. , Esmailzadeh, E. , Cleghorn, W.L. and Mills, J.K. 2008. "Nonlinear Vibration of Micromachined Resonators with Attached Excitation/Detection Electrostatic Comb-drives," In: Proceedings of the ASME 2008 International Mechanical Engineering Congress and Exposition, 1-6 November, Boston, MA, USA .

10.

Langdon, R.M. 1985. "Resonator Sensors - A Review," Journal of Physics E-Scientific Instruments, 18:103-115.

11.

Li, S. , Li, Z. , Chin, B.B. and Cheng, Z.Y. 2004. "Development of Biosensor Based on Micro-diaphragm ," In: Proceedings of SPIE, San Diego, CA, United States, Vol. 5389, pp. 306-313.

12.

Lin, R.M. and Wang, W.J. 2006. "Structural Dynamics of Micro Systems-Current State of Research and Future Directions," Mechanical Systems and Signal Processing, 20:1015-1043.

13.

Lobontiu, N. and Garcia, E. 2005. Mechanics of Microelectromechanical Systems, Kluwer Academic, New York.

14.

Lobontiu, N. 2006. Mechanical Design of Microresonators : Modeling and Applications , McGraw-Hill, New York.

15.

MetalMUMPs design handbook. Available at: http://www.memscap.com/en_mumps.html

16.

Micragem design handbook. Available at: http://www.micralyne.com/capabilities/products/micragem.html

17.

Nguyen, C.T.C. , Katehi, L.P.B. and Rebeiz, G.M. 1998. "Micromachined Devices for Wireless Communications ," In: Proceedings of the IEEE, Vol. 86, pp. 1756-1768.