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Research article

First published 2016-8

Dynamic modeling method for air bearings in ultra-precision positioning stages

Xiulan Bao, Jincheng Mao

Advances in Mechanical Engineering

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Research article

First published 2012-7

Optimization of a phase stabilization controller for an ultra-precision positioning stage using a structured genetic algorithm

Jin Yang, Yu Zhu, Wensheng Yin [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2007-3

Optimal design of a compliant mechanism with circular notch flexure hinges

K-B Choi, C S Han

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2016-11

Iterative tuning notch filter for suppressing resonance in ultra-precision motion control

Wei Teng, Xiaolong Zhang, Yangyang Zhang [...]

Advances in Mechanical Engineering

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Research article

First published 2019-03-16

Intelligent control and performance evaluation of a novel precise positioning stage

Guang-Qing Lu, Audrius Čereška, Giedrius Augustinavičius [...]

Journal of Intelligent & Fuzzy Systems: Applications in Engineering and Technology

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Research article

First published 2018-8

Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

Sen Lu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2019-1

Development of precision blank carriage for manufacturing large gratings and echelles

Xinfang Ge, Biao Chu

Advances in Mechanical Engineering

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Research article

First published 2012-7

Research on the application of Edlén’s formulation in compensation for ultra-precision motion platform’s measurement using an interferometer

Zhenyu Gao, Jinchun Hu, Yu Zhu [...]

Transactions of the Institute of Measurement and Control

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