The complexity of modern surgical and analytical methods requires the miniaturisation of many medical devices. The LIGA technique and also mechanical microengineering are well known for the batch fabrication of microsystems. Actuators and sensors are developed based on these techniques. The hydraulic actuation principle is advantageous for medical applications since the energy may be supplied by pressurised balanced salt solution. Some examples are turbines, pumps and valves. In addition, optical sensors and components are useful for analysis and inspection as represented by microspectrometers and spherical lenses. Finally, plastic containers with microporous bottoms allow a 3-dimensional growth of cell culture systems.
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El-KholiA., BleyP., GöttertJ., MohrJ.. Examination of the Solubility and the Molecular Weight Distribution of PMMA in View of an Optimized System in deep Etch X-Ray Lithography.Microelectronic Engineering1993; 21: 271–4.
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Ritzhaupt-KleisslH-J, BauerW., KnitterR.. Keramische Mikrostrukturen und ihre Anwenung in der Mikrosystemtechnik.Proc. 2. Statuskolloquium des Projektes Mikrosystemtechnik, FZKA, Bericht 5670, 1995; 161–5.
GebhardU., GüntherR., JustE., RütherP.. Fluidic Driven Linear Motor Fabricated by the LIGA Process.Proc. MICRO SYSTEM Technologies ‘96, VDE-Verlag, Berlin, 1996; 609–14.
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RutherP., BacherW., FeitK., MaasD., MenzW.. Microtesting System Made by the LIGA Process to Measure Young's Modulus of Cantilever Microbeams as.Proc. ASME International Mechanical Engineering Congress and Exposition, DSC-Vol.1995; 57-2: 963–7.
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GebhardU., HeinH., MenzW., RutherP.. A Fluidic Micro-Oscillator to Steer a Linear Tool.Proc. Int. Sym. MIMR, 1995; 41–4.
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WallrabeU., MohrJ., TesariI., WulffK.. Power Characteristics of 3-D Operated Microturbines for Minimally Invasive Therapy.Proc. IEEE MEMS'96, IEEE Cat. No. 96CH35856, 1996; 462–6.
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SchomburgW.K., BacherW., BierWFabrication of Microfluidic Devices by Thermoplastic Molding and Diaphragm Transfer.Proc. ASME International Mechanical Engineering Congress and Exposition, DSC-Vol.1995; 57-2: 951–6.
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FahrenbergJ., MaasD., MenzW., SchomburgW.K.. Active Microvalve System manufactured by the LIGA Process.Proc. Actuator ‘94, 1994; 71–4.
WeibezahnK.F., KnedlitschekG., DertingerH., BierW., SchalierT., SchubertK.. Reconstruction of Tissue Layers in mechanically processed Microstructures.J Exp Clin Cancer Res1995; 14, 41–42.
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MüllerC., FromheinO., GöttertJ., KühnerT., MohrJ.. Microspectrometersystem Based on Integrated Optic Components in Polymers as Spectral Detection System for the VIS and NIR Range.Proc. 7th Eur. Conf. on Integrated Optics, ECIO ‘95, 1995; 491–4.
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GötterJ., FischerM., MüllerA.. LIGA-Mikrolinsen und ihre Anwendung in der Medizin-und Informationstechnik.Proc. 2 Statuskolloquium des Projektes Mikrosystemtechnik, FZKA-Bericht 1995, 5670: 169–74.
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ReichertJ., CzolkR., KrausS.C.Development of Optochemical Microsensors for Environmental AnalysisProc Sensor ‘93, Vol. 1993; 2: 55–64.
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SeidelD., BüstgensB., KellerW., MaasD.. Aufbau und Verbindungstechniken für die Kleinserienfertigung von Mikropumpen Proc. 2.Statuskolloquium des Projektes Mikrosystemtechnik, FZKA-Bericht1995; 5670: 51–6.
21.
HagenaO.F., BacherW., HeckeleM., MohrJ., MoritzH., MüllerC.. Erfahrungen beim Aufbau und Betrieb einer Kleinserienfertigung für LIGA-Spektrometer. Proc.2 Statuskolloquium des Projektes Mikrosystemtechnik, FZKA-Bericht1995; 5670: 41–4.
