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Research article

First published 2015-4

Disturbance estimation and compensation for planar motors on the long-stroke stage of a wafer stage

Bizhong Xia, Cuiping Yuan, Yong Tian [...]

Advances in Mechanical Engineering

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Research article

First published 2014-2

Optimal feedforward control with a parametric structure applied to a wafer stage

Yi Jiang, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2020-7

Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage

Weicai Huang, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2014-10

A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage

Dongdong Yu, Yu Zhu, Kaiming Yang [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

Free access

Research article

First published 2012-2

Monolithic design of a compliant template orientation stage for step imprint lithography

J-Y Shao, Y-C Ding, H-Z Liu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Open access

Research article

First published 2016-11

Iterative tuning notch filter for suppressing resonance in ultra-precision motion control

Wei Teng, Xiaolong Zhang, Yangyang Zhang [...]

Advances in Mechanical Engineering

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Abstract

First published 2016-9

Comparative Study of Ulnar-Shortening Osteotomy,Arthroscopy Wafer Procedure,and Distal Metaphyseal Ulnar-Shortening Osteotomy for Ulnar Impaction Syndrome

Hua-Wei Yin, Yu-Tong Chen, Jing Xu [...]

HAND

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Research article

First published 2005-6

Direct determination of the initial thermal evolution behaviour of the platelet defects in hydrogen implanted silicon wafers

Q. Xiao, H. Tu

Materials Science and Technology

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Research article

First published 2007-3

Optimal design of a compliant mechanism with circular notch flexure hinges

K-B Choi, C S Han

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 1987-7

The US Semiconductor Industry: A Locational Analysis

A J Scott, D P Angel

Environment and Planning A: Economy and Space

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