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1-4 of 4 results for wafer scanner

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Open access

Research article

First published 2015-3

Modified robust sliding-mode control method for wafer scanner

Yiguang Wang, Xinglin Chen, Xiaojie Li

Advances in Mechanical Engineering

Retricted access

Research article

First published 2007-3

K-B Choi, C S Han

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

Free access

Review article

First published 2015-8

Yung-Shin Sun

Journal of Laboratory Automation

Open access

Research article

First published 2018-12

Shieh-Kung Huang, Chin-Tsun Chen, Chin-Hsiung Loh [...]

Journal of Low Frequency Noise,Vibration and Active Control