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Research article

First published 2004-6

Cyclic microindentations on monocrystalline silicon in air and in water

I Zarudi, L C Zhang, M V Swain

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2012-1

Development of hot melt adhesive pad and its application to polishing of monocrystalline silicon

S-L Tsai, H-Z Ke, J-H Ke [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2025-8

Research on the influence of cutting parameters on the subsurface damage and surface quality of monocrystalline silicon nanocutting

Dongju Chen, Anqing Wang, Jinwei Fan [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2004-6

Brittle-ductile transition in monocrystalline silicon analysed by molecular dynamics simulation

H Tanaka, S Shimada, N Ikawa

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2022-7

Investigation and multi-objective optimization of monocrystalline silicon wafering using wire electro-discharge machining

Anmol S Verma, Shankar Singh

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2022-1

Mechanism of the scratching of monocrystalline silicon carbide with a diamond grit at different wear stages

Qing Liu, Nian Duan, Yiqing Yu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2025-4

Modeling and optimizing of laser-assisted waterjet process parameters for near-damage-free micromachining of monocrystalline silicon

Xuefei Liu, Chuanzhen Huang, Hanlian Liu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2016-9

Effect of crystallographic orientation and employment of different cutting tools on micro-end-milling of monocrystalline silicon

Zi Jie Choong, Dehong Huo, Patrick Degenaar [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2023

Mechanism of surface modification on monocrystalline silicon during diamond polishing at nanometric scale

Prabhat Ranjan, Tribeni Roy, and Anuj Sharma

Journal of Micromanufacturing

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Research article

First published 2021-11

Experimental investigation into polishing of monocrystalline silicon wafer using double-disc chemical assisted magnetorheological finishing process

Mayank Srivastava, Pulak M Pandey

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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