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Research article

First published 2018-1

Analysis of Effects of precession mechanism error on polishing spot for bonnet polishing

Xu Yang, Zhenzhong Wang, Chunjin Wang [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2009-10

Basic experimental investigation of pulsed electrochemical mechanical polishing process

J. J. Yi, C. M. Chen, X. Q. Tian [...]

Surface Engineering

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Research article

First published 2014-10

Atomically smooth gallium nitride surface prepared by chemical-mechanical polishing with different abrasives

Chunli Zou, Guoshun Pan, Xiaolei Shi [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2013-7

A three-dimensional transient model to predict interfacial phenomena during chemical mechanical polishing using computational fluid dynamics

Jeremiah N Mpagazehe, C Fred Higgs

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2014-10

Investigation on defect control for final chemical mechanical polishing of aluminum alloy

Guoshun Pan, Hua Gong, Zhonghua Gu [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2008-09

Treatment of Chemical Mechanical Polishing Wastewater for Water Reuse by Ultrafiltration and Reverse Osmosis Separation

Lain-Chuen Juang, Dyi-Hwa Tseng, He-Yin Lin [...]

Environmental Engineering Science

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Research article

First published 2011-12

Development and validation of a 200 mm wafer-scale finite element model of contact pressure distribution in chemical mechanical polishing

G Byrne, E Ahearne, P Timoney

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2009-7

Effect of ingredients in slurry containing alumina on chemical mechanical polishing of hard disc substrates

J Z Sun, G S Pan, Y Zhou [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2023-7

Modelling and optimization of surface roughness in chemical mechanical polishing based on DNN-GA

Bo Pan, Zengxu He, Jiang Guo [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2008-6

An improved model considering elastic—plastic contact and partial hydrodynamic lubrication for chemical mechanical polishing

H-J Tsai, Y-R Jeng, P-Y Huang

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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