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Research article

First published 2016-4

Adaptive fuzzy trajectory control for biaxial motion stage system

Wei-Lung Mao, Chung-Wen Hung, Suprapto

Advances in Mechanical Engineering

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Research article

First published 2012-10

Nonlinear iterative learning control applied to an aerostatic X – Y planar motion stage

Dongdong Yu, Kaiming Yang, Yu Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

Open access

Research article

First published 2017-10

Design and testing of a novel flexure-based 3-degree-of-freedom elliptical micro/nano-positioning motion stage

Chen Tang, Maoyun Zhang, Guohua Cao

Advances in Mechanical Engineering

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Research article

First published 2006-5

Fabrication Error Sensitivity Analysis of Three-Degree-Of-Freedom Parallel Submicron Positioning Stage

S-L Chen, Y-C Huang, M Tomizuka

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

Free access

Research article

First published 2016-9

Design and testing of a novel XYZ nanopositioning stage with hybrid structure

Qiang Liu, Zhengkun Qu, Xiaoqin Zhou [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2017-10

Design and analysis of a new flexure-based XY stage

Yiling Yang, Yanding Wei, Junqiang Lou [...]

Journal of Intelligent Material Systems and Structures

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Research article

First published 2007-3

Development of a flexure hinge-based stack-type five-degrees-of-freedom nanometre-scale stage for a heavy-loading machining process

Wenyuh Jywe, Chien-Hung Liu, Yun-Feng Teng

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2015-2

Dynamic modeling and control of a novel XY positioning stage for semiconductor packaging

Fujun Wang, Zhipeng Ma, Weiguo Gao [...]

Transactions of the Institute of Measurement and Control

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Research article

First published 2013-7

The research on geometric error’s tolerance design of X–Y stage’s measurement system accuracy

Zhenyu Gao, Jinchun Hu, Yu Zhu [...]

Transactions of the Institute of Measurement and Control

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Research article

First published 2020-6

Analysis of coupled motion constraints and coupling errors for a six-axis magnetic levitation stage

Xiaochao Sheng, Chia-Hsiang Menq, Tao Tao

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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