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Research article

First published 2020-8

Grinding Marks in Back Grinding of Wafer with Outer Rim

Xianglong Zhu, Yu Li, Zhigang Dong [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2021-10

The effect of the chuck shape on the wafer topography in back grinding of wafer with outer rim

Xianglong Zhu, Weihua Yao, Xiaoguang Guo [...]

Advances in Mechanical Engineering

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Research article

First published 2013-4

Design and evaluation of soft abrasive grinding wheels for silicon wafers

Shang Gao, Zhigang Dong, Renke Kang [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2021-9

Ultra-precision grinding of 4H-SiC wafer by PAV/PF composite sol-gel diamond wheel

Kaiping Feng, Tianchen Zhao, Binghai Lyu [...]

Advances in Mechanical Engineering

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Research article

First published 2012-1

A study on the diamond grinding of ultra-thin silicon wafers

L Zhou, Y B Tian, H Huang [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2011-7

Machining processes for sapphire wafers: a literature review

Z C Li, Z J Pei, P D Funkenbusch

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2013

Vertical Spindle Grinding of Si and Granite with a New Abrasive Disk

Yiqing Yu, Juan Liu, Bin Kuang [...]

Advances in Mechanical Engineering

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Research article

First published 2011-9

Research on topography control of two-spindle and three-workstation wafer grinder

X L Zhu, R K Kang, G Feng [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2025-12

Wafer face shape control model based on automatic spindle inclination adjustment

Lihao Dai, Tianyu Li, Xianglong Zhu [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 1996-05

Development of Real-Time Microvision System Based on Three-Dimensional LSI Technology

Kee-Ho Yu, Yoshihara Kudoh, Takuji Matsumoto [...]

Journal of Intelligent Material Systems and Structures

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