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Research article

First published 2024-8

Safety Assessment of Polysilicone-11 as Used in Cosmetics

Priya Cherian, Wilma F. Bergfeld, Donald V. Belsito [...]

International Journal of Toxicology

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Research article

First published 2002-9

Raman Images of Stress and Structural Variations in Laser-Annealed Polysilicon

Derek J. Gardiner, Andrea A. Parr

Applied Spectroscopy

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Research article

First published 1999-05

Thermally Driven Polysilicon Actuators for Lateral Displacement

Ming-Fa Wu, Cheng-Hsuan Lin, Wensyang Hsu

Journal of Intelligent Material Systems and Structures

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Research article

First published 1995-1

Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

S. Lynch, R. Greef, J. Stoemenos [...]

Materials Science and Technology

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Research article

First published 1998-10

Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors

Patrice Minotti, Philippe Langlet, Gilles Bourbon [...]

Journal of Intelligent Material Systems and Structures

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Research article

First published 1995-1

Nanomodification of silicon (100) surface with scanning tunnelling microscopy using polysilicon on silicon structure

F. Pérez-Murano, N. Barniol, G. Abadal [...]

Materials Science and Technology

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Research article

First published 2020-1

Investigation of hydrogen effect on phosphorus-doped polysilicon thin films

Meryem Mekhalfa, Beddiaf Zaidi, Bouzid Hadjoudja [...]

Surface Engineering

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Research article

First published 1998-10

Arrayed Electrostatic Scratch Drive Actuators: Toward Visible Effects up to the Human Scale

Patrice Minotti, Gilles Bourbon, Philippe Langlet [...]

Journal of Intelligent Material Systems and Structures

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Research article

First published 2001-1

Tribology on the macroscale to nanoscale of microelectromechanical system materials: A review

B Bhushan

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Other

First published 2003-10

Size and Frequency of Defects in Silicon MEMS

David A. Lavan, B. L. Boyce, T. E. Buchheit

International Journal of Damage Mechanics

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