New Instrumental Techniques and Their Application to Electron Microprobe Analysis and Scanning Electron Microscopy

Abstract

This paper reviews several applications of new instrumentation which have been developed for the electron microprobe analyzer and the scanning electron microscope. By using signal modulation techniques and phase sensitive detection, the information from the scanning electron microscope is made more quantitative. Digital techniques applied to photomultiplier outputs allow more sensitive and quantitative measurements of cathodoluminescence intensities and secondary electron emission. The technique of pulse rate analysis is used to enhance the information contained in x-ray scanning micrographs from an electron microprobe analyzer. Several examples of these techniques are discussed.

Keywords

Instrumentation Electron microprobe analyzer Scanning electron microscopy Pulse rate analysis

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References

Reid

L. R.

and Smith

J. P.

, Rev. Sci. Instrum. 40, 316 (1969).

Saparin

G. A.

Spivak

G. Y.

and Stepanov

S. S.

, Proc. 6th Int. Congr. Electron Microscopy (1966), pp. 609–610.

Nixon

W. C.

, Proc. 2nd Ann. Scanning Electron Microscope Symp. (1969), pp. 3–10.

Eberhardt

E. H.

, IEEE Trans. Nucl. Sci. 11, 48 (1964).

Kyser

D. F.

McCoy

, and Wittry

D. B.

, 2nd Natl. Conf. Electron Microprobe Anal., Boston (1967).

Strack

and Smith

J. P.

, Electrochem. Soc. Meeting, Chicago (1967).

Franklin

M. L.

Horlick

, and Malmstadt

H. V.

, Anal. Chem. 41, 2 (1969).

Reid

L. R.

and Smith

J. P.

, Rev. Sci. Instrum. 41, 26 (1970).

Heinrich

K. F. J.

, NBS Technical Note 278 (1967).

10.

Evans

R. D.

, The Atomic Nucleus (McGraw—Hill, New York, 1955), p. 794.