Multiwalled carbon nanotube (MWCNT) bridges, grown using low-pressure, metal-catalyzed, chemical vapour deposition (CVD) technique between silicon posts, were used as tiny piezoresistors to monitor vibration and bending/deformation of silicon cantilever beams. The weld strength of the CNTs, measured using atomic force microscopy (AFM), was larger than 100 nN/CNT and their full-scale resistance change was larger than 105 ω. The effective longitudinal piezoresistivity of these CNTs was larger than 4×10−8 Pa−1, which is larger than that of π44 in silicon.
ChenJ. K.HuangY.OrtizM.J. of the Mechanics and Physics of Solids, 1998, 46, 789.
4.
CumingsJ.ZettlA., (Eds) Applied Physics of Nanotubes: Fundamentals of Theory, Optics and Transport Devices, 2005, (Springer-Verlag, Berlin).
5.
Tabib-AzarM.XieY.Sensitive NH3OH and HCl gas sensors using self-aligned and self-welded multiwalled carbon nanotubes. Sensors Journal, IEEE, 7(10), October 2007, 435–1439.
6.
FungC. K. M.ZhangM. Q. H.DongZ.LiW. J.Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly. In Proceedings of 5th IEEE Conference on Nanotechnology, 2005, Nagoya, Japan.
