Development of a DVD pickup-based four-degrees- of-freedom motion error measuring system for a single-axis linear moving platform

Abstract

In this study, a simple and high-resolution four-degrees-of-freedom (4-DOF) motion error measuring system based on DVD pickup has been proposed. It can simultaneously measure the horizontal straightness error and three angular errors of a single-axis linear moving platform. The horizontal straightness error is measured based on the focus technique of DVD pickup and the inverse algorithm is used to solve pitch, yaw, and roll angular errors through the kinematic analysis. The grating is mounted on the moving axis of a single-axis linear moving platform and reflects incident laser beam into several diffractive rays. Photodiode IC (PDIC) of DVD pickup is set up for detecting the focus error signal (FES) of zero-order diffraction ray from grating and quadrant detectors are set up for detecting the position of ±1st-order diffraction rays from grating. The 4-DOF motion error measuring system detected the three angular errors with a related accuracy of about ±1 arc sec for a measuring range of ±100 arc sec, and detected horizontal straightness with a related accuracy of about ±2 μm for a measuring range of ±150 μm.

Keywords

four degrees of freedom quadrant detector DVD pickup

References

Bobroff

, ‘Recent advances in displacement measuring interferometry’ Measmt Sci. Technol. 4 (1993): 907–926.

Demarest

F. C.

, ‘High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics’ Measmt Sci. Technol. 9 (1998): 1024–1030.

Schmitz

T. L.

Evans

C. J.

Davies

J. A.

Estler

W. T.

, ‘Displacement uncertainty in interferometric radius measurements’ CIRP Annls Mfg Technol. 51 1 (2002): 451–454.

Dornfeld

Min

Takeuchi

, ‘Recent advances in mechanical micromachining’ CIRP Annls Mfg Technol. 55 2 (2006): 745–768.

Rusnaldy

T. J.

Kim

H. S.

, ‘An experimental study on microcutting of silicon using a micromilling machine’ Int. J. Advd Mfg Technol. 39 1–2 (2008): 85–91.

Fan

K. C.

Chen

M. J.

, ‘A six-degree-of-freedom measurement system for the accuracy of X-Y stages’ Precision Engng 24 1 (2000): 15–23.

Jywe

W. Y.

Liu

C. H.

, ‘A new measuring apparatus for verifying the cnc machine tools performance using position silicon detector’ J. Chin. Soc. Mech. Engrs 22 1 (2001): 21–29.

Liu

C. H.

Jywe

W. Y.

Chen

C. K.

, ‘Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage’ Int. J. Advd Mfg Technol. 26 7 (2005): 808–813.

Kim

J. A.

Kim

K. C.

Bae

E. W.

Kwak

Y. K.

, ‘Six-degree-of-freedom displacement measurement system using a diffraction grating’ Rev. Sci. Instrum. 71 8 (2000): 3214–3219.

10.

Kim

J. K.

Bae

E. W.

Kim

S. H.

Kwak

Y. K.

, ‘Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets’ Prec. Engng 26 (2002): 99–104.

11.

Liu

C. H.

Jywe

W. Y.

Hsu

C. C.

Hsu

T. H.

, ‘Development of a laser-based high-precision six-degree-of-freedom motion errors measurement system for linear stage’ Rev. Sci. Instrum. 76 (2005):.

12.

Gao

Huang

P. S.

Tomohiko

Satoshi

, ‘A compact and sensitive two-dimensional angle probe for flatness measurement of a large silicon wafer’ Prec. Engng 26 (2002): 396–404.

13.

Huang

H. C.

Liu

C. H.

Jywe

W. Y.

Wang

M. S.

Fang

T. H.

, ‘Development of a three-degrees-of-freedom laser linear encoder for error measurement of a high precision stage’ Rev. Sci. Instrum. 78 6 (2007): 1–3.

14.

Huang

H. L.

Liu

C. H.

Jywe

W. Y.

Wang

M. S.

, ‘High resolution three-degrees-of-freedom motion errors measuring system for a single-axis linear moving platform’ Proc IMechE, Part B: J. Engineering Manufacture 223 B1 (2009): 107–114 DOI 10.1243/09544054JEM1190.

15.

Armstrong

T. R.

Fitzgerald

M. P.

, ‘An autocollimator based on the laser head of a compact disc player’ Measmt Sci. Technol. 3 (1992): 1072–1076.

16.

Fan

K. C.

Chu

C. L.

Mou

J. I.

, ‘Development of a low-cost autofocusing probe for profile measurement’ Measmt Sci. Technol. 12 (2001): 2137–2146.

17.

Fan

K. C.

Chu

C. L.

Liao

J. L.

Mou

J. I.

, ‘Development of a high-precision straightness measuring system with DVD pick-up head’ Measmt Sci. Technol. 14 (2003): 47–54.

18.

Chu

C. L.

Lin

C. H.

, ‘Development of an optical accelerometer with a DVD pick-up head’ Meas. Sci. Technol. 16 (2005): 2498–2502.

19.

Jywe

W.-Y.

Liu

C.-H.

Shien

W. H.

Shyu

L.-H.

Fang

T.-H.

Sheu

Y.-H.

Hsu

T.-H.

Hsieh

C.-C.

, ‘Developed of a multi-degree of freedoms measuring system and an error compensation technique for machine tools’ J. Phys: Conference Series 48 (2006): 761–765.

20.

Model KWS-251 of DVD pickup specifications, Sony.

21.

Model KBX046 of BK7 Precision Bi-Convex specifications, Newport.

22.

Available from http://jp.hamamatsu.com/resources/products/ssd/pdf/s4349_kmpd1007e02.pdf.

23.

Model NT43-211 of reflective ruled diffraction gratings specifications, Edmund Optics.

24.

Hecht

, Optics (New York: Addison-Wesley 2001).

25.

Myszka

D. H.

, Machines and mechanisms: Applied kinematic analysis (New Jersey: Prentice Hall 2005).

26.

Available from http://www.newport.com/file_store/PDFs/tempPDFs/e3916_LDS-Vector-Electronic-Autocollimator.pdf.

27.

Available from http://cp.literature.agilent.com/litweb/pdf/5964-9307E.pdf.