We used low-cost ultrasonic spray pyrolysis to prepare fluorine-doped tin oxide film from 470 to 590°C in 30°C increments with air and nitrogen as carrier gas. The film had 86.4% optical transparency and 16.8 Ω/□ electrical resistivity. The quality factor was defined as average optical transmittance to the 10th power divided by square resistance. The quality factor for one film fabricated at 590°C was 139 × 10−4/Ω, which is acceptable for many commercial applications. Detailed analysis indicates that the optical and electrical properties are greatly influenced by the film microstructure which is a function of temperature.
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