Abstract
Fully dense, transparent, submicron, polycrystalline, anatase thin films, deposited for 30-120 min on glass slides heated at 400°C, were prepared by ultrasonic spray pyrolysis using titanium butoxide dissolved in methanol. The films were characterised using laser Raman microspectroscopy, single beam focused ion beam milling and ultraviolet-visible (UV-Vis) spectrophotometry in order to assess the mineralogy, thickness and transmittance respectively. The thin films showed increasing thickness and roughness but decreasing transmittance as the deposition time increased. There do not appear to be any published kinetics data for the deposition of such films. Consequently, what was found to be a linear growth rate was determined to be 11 nm min−1 (∼0·18 nm s−1).
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