Development of hybrid amorphous barrier coatings on polymer substrates

Abstract

Flexible hybrid Ta–C–O–F coatings were deposited on polyethylene naphthalate substrates using RF co-sputtering method. The morphologies of the hybrid Ta–C–O–F coatings co-sputtering were strongly dependent on polytetrafluoroethylene (PTFE) sputtering power. By increasing the polymer sputtering power from 20 to 60 W, the water vapor transmission rate increase from 0.015 to 0.030 g/m²day. The water vapor transmission rate remains relatively constant at 0.030 g/m²day with further increasing the PTFE power to 80 W. Coatings prepared by PTFE sputtering power of 20 to 80 W exhibits an average optical transmittance of higher than 70% in the visible range. The Ta–C–O–F coating with a thickness of 577.5 nm was repeatedly flexed back and forth to a radius of curvature of 3 mm. No cracks were observed in the layer after bending. The results show that the hybrid coatings are not only highly flexible, but also with good water vapor barrier property.