In this article, an automatic detection and judgement method for macro defects in thin film transistor (TFT) fabrication process is proposed using a high-resolution line charge-coupled device camera as a preliminary inspection method for TFT liquid crystal display (TFT-LCD) panel. Macro defects are classified primarily into four types. Relevant detection and judgement methods are then applied according to the type of macro defect using different criteria such as diffraction pattern shifts, just noticeable differences, and the gradient of inspection images. The proposed method is verified with industrial experiments. In the experiment, 559 TFT glasses are used, which are sampled among the glasses and were judged as PASS (i.e. non-killer-defected glass) in the TFT fabrication process by a conventional human inspection method, but were judged as REJECT (i.e. killer-defected glass) in the module process. All macro defects in the sampled glasses were detected and rejected in the TFT fabrication process using the proposed method.
SonH. I.Automatic inspection method for macro defects in TFT-LCD color filter fabrication process. IEICE Electron. Express, 2009, 6(8), 516–521.
2.
KuoY.YangT.A case study on the operator allocation decision for TFT-LCD inspection and packaging process. J. Manuf. Technol. Manage, 2006, 17(3), 363–375.
3.
LeeY. J.YooS. I.Automatic detection of region-Mura defect in TFT-LCD. IEICE Trans. Inform. Syst, 2004, E87-D, 2371–2378.
4.
LiuY.-H.HuangY.-K.LeeM.-J.Automatic inline defect detection for a thin film transistor-liquid crystal display array process using locally linear embedding and support vector data description. Meas. Sci. Technol, 2008, 19(9), 1–16.
5.
LiuY.-H.LiuY.-C.ChenY.-J.High-speed inline defect detection for TFT-LCD array process using a novel support vector data description. Expert Syst. Appl, 2011, 38(5), 6222–6231.
