Parallel manipulator systems with large workspace and high-accuracy positioning are attractive for a variety of accuracy engineering applications. In this article, a new 12-DOF macro–micro dual parallel manipulator is presented, which comprises a 6-PSU macro symmetrical parallel manipulator and a 6-SPS micro orthogonal parallel manipulator. This novel mechanism can not only realize a large range of movement but also accurate positioning. To achieve high-accuracy control, a macro–micro integrated model of the macro–micro dual parallel mechanism is proposed, including a mechanical system model and drive system model. Aiming at the trajectory planning for a multi-degree-of-freedom (DOF) manipulator, a smooth optimization trajectory planner for the 12-DOF macro–micro dual parallel manipulator is presented to realize smooth trajectory generation. A high-accuracy motion controller combining feedback and feedforward is developed based on the drive system model. Finally, the experiment well validates the correctness of the integrated model and motion control algorithm and reveals that the proposed mechanism is expected to be adopted into micro scale manipulations.
MaNYuJJDongX, et al.Design and stiffness analysis of a class of 2-DoF tendon driven parallel kinematics mechanism. Mech Machine Theor2018; 129: 202–217.
2.
KnigKRiemannIFritzscheW. Nanodissection of human chromosomes with near-infrared femtosecond laser pulses. Opt Lett2001; 26(11): 819–821.
3.
TerpitzUZimmermannD. Isolation of guard cells from fresh epidermis using a piezo-power micro-dissection system with vibration-attenuated needles. Biotechniques2010; 48(1): 68–70.
VogelALorenzKHornefferV, et al.Mechanisms of laser-induced dissection and transport of histologic specimens. Biophys J2007; 93(12): 4481–4500.
6.
FengJGaoF, et al.A new macro-micro dual drive parallel robot for chromosome dissection. J Mech Sci Technol2012; 26(1): 187–194.
7.
ParkKDesaiJP. Micropositioning and control of an underactuated platform for microscopic applications. IEEE-ASME Trans Mechatron2016; 21(6): 2635–2646.
8.
YangMDuZChenF, et al.Kinetostatic modelling of a 3-prr planar compliant parallel manipulator with flexure pivots. Precis Eng2017; 48: 323–330.
9.
CaiKTianYLiuX, et al.Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity. Robot Comput-Integr Manuf2019; 56: 95–105.
10.
GhafarianMShirinzadehBAl-JodahA, et al.Adaptive fuzzy sliding mode control for high-accuracy motion tracking of a multi-DOF micro/nano manipulator. IEEE Robot Autom Lett2020; 5(3): 4313–4320.
11.
SunTZhaiYSongY, et al.Kinematic calibration of a 3-DoF rotational parallel manipulator using laser tracker. Robot Comput-Integr Manuf2016; 41: 78–91.
12.
JinSKimJSeoTW. Optimization of a redundantly actuated 5R symmetrical parallel mechanism based on structural stiffness. Robotica2015; 33(9): 1973–1983.
13.
SharonA. Enhancement of Manipulator Accuracy Using a Macro/micro Manipulator system. PhD Thesis. Cambridge, MA: Massachusetts Institute of Technology, 1983.
14.
SharonAHoganNHardtDE. The macro/micro manipulator: an improved architecture for robot control. Robot Comput-Integr Manuf1993; 10(3): 209–222.
15.
SchindlbeckCPapeCReithmeierE. Process-integrated state estimation of optical systems with macro-micro manipulators based on wavefront filtering. IEEE Robot Autom Lett2019; 4(4): 4078–4085.
16.
DongWTangJEldeebY. Design of a linear-motion dual-stage actuation system for precision control. Smart Mater Struct2009; 18(9): 095035.
17.
ChenMYLinTBHungSK, et al.Design and experiment of a macro-micro planar maglev positioning system. IEEE Trans Ind Electron2012; 59(11): 4128–4139.
18.
ZhangQLiCDZhangJT, et al.Synchronized motion control and precision positioning compensation of a 3-DOFs macro-micro parallel manipulator fully actuated by piezoelectric actuators. Smart Mater Struct2017; 26(11): 115001.
19.
ChiangMHChenCCTsouTN. Large stroke and high precision pneumatic-piezoelectric hybrid positioning control using adaptive discrete variable structure control. Mechatronics2005; 15(5): 523–545.
20.
PahkHJLeeDSParkJH. Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation. Int J Mach Tools2001; 41(1): 51–63.
21.
MamonHMuhammadH. Influence of cables layout on the dynamic workspace of a six-DOF parallel marine manipulator. Mech Machine Theor2018; 129: 191–201.
22.
WuXWangKWangY. Kinematic design and analysis of a 6-DOF spatial five-Bar linkage. Mech Machine Theor2021; 158(1): 104227.
23.
AmokraneWBelharetKSouissiM. Macro-micromanipulation platform for inner ear drug delivery. Robot Auton Syst2018; 107: 10–19.
24.
XuQS. Adaptive integral terminal third-order finite-time sliding-mode strategy for robust nanopositioning control. IEEE Trans Ind Electron2021; 68(7): 6161–6170.
25.
QiCKGaoFLiH-X. An incremental Hammerstein-like modeling approach for the decoupled creep, vibration and hysteresis dynamics of piezoelectric actuator. Nonlinear Dyn2015; 82: 2097–2118.
26.
LiuLTanKKTeoCS, et al.Development of an approach towards comprehensive identification of hysteretic dynamics in piezoelectric actuators. IEEE Trans Control Syst Technol2013; 21(5): 1–12.
27.
YangTWXuWLHanJD. Dynamic compensation control of flexible macro-micro manipulator systems. IEEE Trans Control Syst Technol2010; 18(1): 143–151.
28.
ZhengJSaltonAFuM. Design and control of a rotary dual-stage actuator positioning system. Mechatronics2011; 21(6): 1003–1012.
29.
VieiraHLWajnbergEBeckAT, et al.Reliable motion planning for parallel manipulators. Mech Machine Theor2019; 140: 553–566.
30.
ChenZGaoFSunQ, et al.Ball-on-plate motion planning for six-parallel-legged robots walking on irregular terrains using pure haptic information. Mech Machine Theor2019; 141: 136–150.
31.
MellingerDKumarV. Minimum snap trajectory generation and control for quadrotors. In: IEEE international conference on robotics and automation (ICRA), 09-13 May 2011, Shanghai. IEEE, pp. 2520–2525.
32.
ElgammalAFanniMMohamedA. Design and analysis of a novel 3D decoupled manipulator based on compliant pantograph for micromanipulation. J Intell Robot Syst2017; 87: 43–57.
33.
DongYGaoFYueY. Modeling and prototype experiment of a six-DOF parallel micro-manipulator with nano-scale accuracy. Proc Inst Mech Eng C: J Mech Eng Sci2015; 229(14): 2611–2625.
34.
ChangTKAndrewSChanKY. Review of control and sensor system of flexible manipulator. J Intell Robot Syst2015; 77: 187–213.
35.
WenSYongYZhangZ. Estimating the Gerber–Shiu function in the perturbed compound poisson model by Laguerre series expansion. J Math Anal Appl2019; 469(2): 705–729.
36.
ZhangZYongY. Valuing guaranteed equity-linked contracts by Laguerre series expansion. J Comput Appl Math2019; 357: 329–348.
37.
NowakAStempakK. Riesz transforms for multi-dimensional Laguerre function expansions. Adv Math2007; 215(2): 642–678.
38.
WangWWangRChenZ, et al.A new hysteresis modeling and optimization for piezoelectric actuators based on asymmetric Prandtl-Ishlinskii model. Sens Actuator A-Phys2020; 316: 112431.
39.
FengYLiYLiangM. System identification of micro piezoelectric actuators via rate-dependent prandtl-Ishlinskii hysteresis model based on a modified PSO algorithm. IEEE Trans Nanotechnol2020; 20: 205–214.
40.
YanPZhangY. High precision tracking of a piezoelectric nano-manipulator with parameterized hysteresis compensation. Smart Mater Struct2018; 27(6): 065018.
41.
FenJGaoFZhaoXC. Calibration of a six-DOF parallel manipulator for chromosome dissection. Proc Inst Mech Eng Part C: J Mech Eng Sci2011; 226(4): 1084–1096.
