Stress Measurement Using Grazing Incident Angle Scattering Geometry-Problem of Elastic Anisotropy

Abstract

A new method based on the grazing incident angle scattering geometry was applied for stress measurement in near surface layers. The advantage of this geometry is a constant penetration depth of the X-ray beam during experiment. The anisotropy of diffraction elastic constants has to be taken into account for the proper interpretation of experimental results.