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1-3 of 3 results for wafer-handling robotic arm

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Open access

Research article

First published 2021-5

Task failure prediction for wafer-handling robotic arms by using various machine learning algorithms

Ping Wun Huang, Kuan-Jung Chung

Measurement and Control

Open access

Research article

First published 2017-4

Masaru Sakai, Tatsushi Nishi

Advances in Mechanical Engineering

Retricted access

Research article

First published 2011-8

Chi Zhang, Guangzhou Zhao, King Jet Tseng

International Journal of Applied Electromagnetics and Mechanics