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Research article

First published 2012-1

Development of hot melt adhesive pad and its application to polishing of monocrystalline silicon

S-L Tsai, H-Z Ke, J-H Ke [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Open access

Research article

First published 2015-2

The effects of abrasive yielding on the polishing of SiC wafers using a semi-fixed flexible pad

Jing Lu, Yang Li, Xipeng Xu

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2020-11

Investigations on flexible pad polishing for nano-finishing of freeform optics mold

Vinod Mishra, Dali R. Burada, Vinod Karar [...]

Journal of Micromanufacturing

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Research article

First published 2022-11

Basic exploration and research on magnetoelectric synergistic rheological finishing

Zhanliang Huang, Jisheng Pan, Bin Luo [...]

Journal of Intelligent Material Systems and Structures

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Research article

First published 2013-7

A three-dimensional transient model to predict interfacial phenomena during chemical mechanical polishing using computational fluid dynamics

Jeremiah N Mpagazehe, C Fred Higgs

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2007-2

A new magnetic polishing liquid (MPL) for contact force-free surface finishing II: Detailed performance in metal surface finishing

Yongbo Wu, Kenji Tetsuka, Masana Kato [...]

International Journal of Applied Electromagnetics and Mechanics

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Research article

First published 2011-12

Development and validation of a 200 mm wafer-scale finite element model of contact pressure distribution in chemical mechanical polishing

G Byrne, E Ahearne, P Timoney

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2017-6

Investigation into material removal influenced by edge effect in polishing

Wansong Zhou, Lei Zhang, Cheng Fan [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2015-5

Development of a real-time force-controlled compliant polishing tool system with online tuning neural proportional–integral–derivative controller

Wansong Zhou, Lei Zhang, Cheng Fan [...]

Proceedings of the Institution of Mechanical Engineers,Part I: Journal of Systems and Control Engineering

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Research article

First published 2008-6

An improved model considering elastic—plastic contact and partial hydrodynamic lubrication for chemical mechanical polishing

H-J Tsai, Y-R Jeng, P-Y Huang

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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