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Research article

First published 2010-7

Characterization of sidewall roughness for silicon microstructures in micro actuator

Guoqiang Han, Zhuangde Jiang, Weixuan Jing [...]

International Journal of Applied Electromagnetics and Mechanics

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Research article

First published 2007-6

Superhydrophobic surfaces by dynamic nanomasking and deep reactive ion etching

Ying Song, Min Zou

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2006-9

Novel die-sinking micro-electro discharge machining process using microelectromechanical systems technology

J-B Li, K Jiang, G J Davies

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2023-5

Study of metal-assisted chemical etching of silicon as an alternative to dry etching for the development of vertical comb-drives

Varun P. Sharma, Rahul Shukla, C. Mukherjee [...]

Journal of Micromanufacturing

Open access

Research article

First published 2012

Design,Fabrication,and Testing of a SOI-MEMS-Based Active Microprobe for Potential Cellular Force Sensing Applications

Li Zhang, Jingyan Dong

Advances in Mechanical Engineering

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Research article

First published 2016-10

High-precision motion of magnetic microrobot with ultrasonic levitation for 3-D rotation of single oocyte

Lin Feng, Pei Di, Fumihito Arai

The International Journal of Robotics Research

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Research article

First published 2007-2

The development of a novel Bio-MEMS filtration chip for the separation of specific cells in fluid suspension

M Prince, X Ma, P Docker [...]

Proceedings of the Institution of Mechanical Engineers,Part H: Journal of Engineering in Medicine

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Research article

First published 2022-11

Fabrication of microfluidic channel of polydimethylsiloxane using X-ray lithography and its surface nanostructuring

Puspen Mondal, Shweta Saundarkar, Nitin Khantwal [...]

Journal of Micromanufacturing

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