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Research article

First published 2015-9

Research on increasing silicon etch rate in deep wet etching with tetramethyl ammonium hydroxide etchant

Dong Chen, ShiBin Liu, JinTao Liang [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2017-12

Effects of deep reactive ion etching parameters on etching rate and surface morphology in extremely deep silicon etch process with high aspect ratio

Tiantong Xu, Zhi Tao, Hanqing Li [...]

Advances in Mechanical Engineering

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Research article

First published 2014-3

Fabrication of the hexagonal Si nanorod arrays using the template of polystyrene nanospheres in monolayer dispersion

Chuang Yue, Jing Li, Junyong Kang

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 1977-5

A Study of the Optical Emission from an rf Plasma during Semiconductor Etching

W. R. Harshbarger, R. A. Porter, T. A. Miller [...]

Applied Spectroscopy

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Research article

First published 2018

C-Si hybrid photonic structures by full infiltration of conjugated polymers into porous silicon rugate filters

Valentina Robbiano, Salvatore Surdo, Alessandro Minotto [...]

Nanomaterials and Nanotechnology

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Research article

First published 2000-11

The dynamics of a vibrating silicon diaphragm microgyroscope

J S Burdess, A J Harris, D Wood [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2020-5

Nano-finishing of MEMS-based platforms for optimum optical sensing

Ankur Gupta, Poonam Sundriyal, Aviru Basu [...]

Journal of Micromanufacturing

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Research article

First published 2005-01

Endothelialized Microvasculature Based on a Biodegradable Elastomer

Christina Fidkowski, Mohammad R. Kaazempur-Mofrad, Jeffrey Borenstein [...]

Tissue Engineering Part A: Research Advances

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Research article

First published 2021-7

Tribological behaviour of hypereutectic Al-Si automotive cylinder liner material under dry sliding wear condition in severe wear regime

Ajith Kurian Baby, M Priyaranjan, K Deepak Lawrence [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2008-1

Design and fabrication of a micromachined electrostatically suspended gyroscope

B Damrongsak, M Kraft, S Rajgopal [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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