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1-5 of 5 results for Semiconductor wafer cleaning

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Research article

First published 2008-9

Potential of Far-Ultraviolet Absorption Spectroscopy as a Highly Sensitive Analysis Method for Aqueous Solutions. Part II: Monitoring the Quality of Semiconductor Wafer Cleaning Solutions Using Attenuated Total Reflection

Noboru Higashi, Akifumi Ikehata, Naomi Kariyama [...]

Applied Spectroscopy

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Research article

First published 2017-7

Seok-Woo Jang, Gye-Young Kim

International Journal of Distributed Sensor Networks

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Other

First published 2003-09

Archibald Tewarson

Journal of Fire Sciences

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Research article

First published 2020-3

Yan He, Zewei Yuan, Kai Cheng [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

Open access

Research article

First published 2018-11

Mohamed Selmy, Mohamed Fanni, Abdelfatah M Mohamed [...]

International Journal of Advanced Robotic Systems