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Research article

First published 2023-4

Investigation of the tribochemical reaction mechanism in dry-type CMP of 6H-SiC substrate

Zongtang Li, Zhichao Qi, Tianyi Zhang [...]

Surface Engineering

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Research article

First published 1996-1

Electrical characterisation of epitaxial 6H-SiC by admittance spectroscopy

C. Raynaud, F. Ducroquet, P. N. Brounkov [...]

Materials Science and Technology

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Research article

First published 2013-8

Comparative study on structural and optical properties of nitrogen rich InN on Si(110) and 6H-SiC

M Amirhoseiny, Z Hassan, S S Ng

Surface Engineering

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Research article

First published 2018-11

Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC

Zhongdu He, Zongwei Xu, Mathias Rommel [...]

Journal of Micromanufacturing

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Research article

First published 2015-3

A study on the deep etching and ohmic contact process of 6H-SiC high-temperature pressure sensor

Fei Tang, Ximin Ma, Xiaohao Wang

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

Free access

Research article

First published 2019-1

Removal mechanism of 4H- and 6H-SiC substrates (0001 and 000 1 ¯ ) in mechanical planarization machining

Jing Lu, Qiufa Luo, Xipeng Xu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 1996-1

Optical investigation of deep defects in GaN epitaxial layers grown on 6H-SiC

K. Pressel, S. Nilsson, C. Wetzel [...]

Materials Science and Technology

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Research article

First published 2011-1

TEM investigation of hot pressed ‐10 vol.%SiC–ZrB 2 composite

D D Jayaseelan, Y Wang, G E Hilmas [...]

Advances in Applied Ceramics: Structural,Functional and Bioceramics

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Research article

First published 2022-2

Polycarbosilane facilitated growth of SiC nanowires from biowaste coconut shell

Mangesh Lodhe, M. Balasubramanian

Advances in Applied Ceramics: Structural,Functional and Bioceramics

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Research article

First published 2007-11

MicroRaman spectroscopy of protective coatings deposited onto C/C–SiC composites

T. S. Perova, R. A. Moore, K. Berreth [...]

Materials Science and Technology

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