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Research article

First published 2019-10

Stress Characterization of the Interface Between Thermal Oxide and the 4H-SiC Epitaxial Layer Using Near-Field Optical Raman Microscopy

Masanobu Yoshikawa, Yasuhiko Fujita, Masataka Murakami

Applied Spectroscopy

Open access

Research article

First published 2021-9

Ultra-precision grinding of 4H-SiC wafer by PAV/PF composite sol-gel diamond wheel

Kaiping Feng, Tianchen Zhao, Binghai Lyu [...]

Advances in Mechanical Engineering

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Research article

First published 2017-5

Characterization of Thermal Oxides on 4H-SiC Epitaxial Substrates Using Fourier-Transform Infrared Spectroscopy

Hirofumi Seki, Masanobu Yoshikawa, Takuma Kobayashi [...]

Applied Spectroscopy

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Research article

First published 2011-5

Characterization of Silicon Dioxide Films on a 4H-SiC Si(0001) Face by Fourier Transform Infrared (FT-IR) Spectroscopy and Cathodoluminescence Spectroscopy

Masanobu Yoshikawa, Hirohumi Seki, Keiko Inoue [...]

Applied Spectroscopy

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Research article

First published 2016-7

Stress Characterization of 4H-SiC Metal–Oxide–Semiconductor Field-Effect Transistor (MOSFET) using Raman Spectroscopy and the Finite Element Method

Masanobu Yoshikawa, Kenichi Kosaka, Hirohumi Seki [...]

Applied Spectroscopy

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Research article

First published 2013-5

Abnormal Behavior of Longitudinal Optical Phonon in Silicon Dioxide Films on 4H–SiC Bulk Epitaxial Substrate Using Fourier Transform Infrared (FT-IR) Spectroscopy

Masanobu Yoshikawa, Hirohumi Seki, Tsuneyuki Yamane [...]

Applied Spectroscopy

Free access

Research article

First published 2019-1

Removal mechanism of 4H- and 6H-SiC substrates (0001 and 000 1 ¯ ) in mechanical planarization machining

Jing Lu, Qiufa Luo, Xipeng Xu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2014-10

Characterization of Inhomogeneity in Silicon Dioxide Films on 4H-Silicon Carbide Epitaxial Substrate Using a Combination of Fourier Transform Infrared and Cathodoluminescence Spectroscopy

Masanobu Yoshikawa, Hirohumi Seki, Keiko Inoue [...]

Applied Spectroscopy

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Research article

First published 2006-10

Study of reaction process on Ni/4H–SiC contact

Y. Cao, L. Nyborg, D.-Q. Yi [...]

Materials Science and Technology

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Research article

First published 2020-11

Interactions Between Epitaxial Graphene Grown on the Si- and C-Faces of 4H-SiC Investigated Using Raman Imaging and Tip-Enhanced Raman Scattering

Shohei Uemura, Sanpon Vantasin, Yasutaka Kitahama [...]

Applied Spectroscopy

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