Abstract
In order to design an electromagnetically driven microsystem serving as an ear implant to overcome amblyacousia, Finite Element Method (FEM) simulations were conducted. The system consists of three parts, an upper system part, a lower system part and a plunger. The design process included mechanical, electromagnetic, and thermal simulations. Based on the simulations a system layout was derived and the microactuator was fabricated on the basis of micro system technology processes in batch fabrication. The assembly of the system was performed on system level.
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