Abstract
A new inchworm-type piezoelectric actuator with round trip, variable step, large displacement is presented in this paper. It has two parts: the clamping structure, the pushing structure. Experiment system with high voltage drivers and closed-loop control system is designed. Dynamic model for piezoelectric actuator is built up. This actuator can move a displacement of± 8 mm. Dynamic performance of the actuator is simulated by the MATLAB Simulink, and the results of simulation is in agreement with that of the experiment in 30 nanometer accuracy demanded.
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