Piezoelectric stack actuators have been widely applied in mirco- or nano-positioning systems, but its hysteresis nonlinearity limits the performance. A driving power supply with charge feedback control was proposed to compensate the hysteresis of piezoelectric stack actuators. The drive circuit controlled by PWM waves was implemented in printed circuit board. A real-time controller was designed to acquire the voltage signals, calculate the charge on piezoelectric stack actuator and generate the PWM waves for drive circuit. Experimental results show that the proposed power supply with charge feedback control can effectively compensate the hysteresis and improve the positioning accuracy.
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