To realize high performance and suppress the backward motion of the inertia piezoelectric actuator, a novel inertial piezoelectric actuator with double-stator cooperative motion is proposed, designed, fabricated, and tested. The structure and the operation principle of the proposed actuator are first explained in detail. Then the flexible structure is analyzed through the finite element simulation. In addition, the dynamic model of the actuator with double-stator working mode is established and simulated in MATLAB/Simulink, and the step characteristic is investigated, which provided a guidance for the design and optimization of inertial piezoelectric actuators with double-stator. Finally, an experimental investigation of the proposed actuator prototype was carried out and the results showed a significant improvement in the performance of the proposed actuator compared to the previous double-stator inertial piezoelectric actuators. The actuator exhibits a maximum speed of 32.84 mm/s, a maximum lateral load of 20 N, a maximum vertical load of 200 N, a minimum backward rate of 0.91%, and a minimum resolution of 127.5 nm. The actuator with double-stator can improve the maximum output performance to a certain extent, and suppress the backward rate, presenting a specific reference value for the design of future high-performance piezoelectric actuators.
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