Abstract
It is shown that variable-angle attenuated total reflectance Fourier transform infrared spectroscopy is a viable technique to recover depth profile information on the molecular level. A number of known step profiles are measured to determine the limits of applicability for this method. Thickness results obtained by using the internal reflection technique are compared with thickness determination with the use of a profilometer.
Keywords
Get full access to this article
View all access options for this article.
References
1.
Harrick
N. J.
, Internal Reflection Spectroscopy (Harrick Scientific, Ossining , New York , 1967 ).
2.
Popov
V. Y.
and
Lavrent'ev
V. V
, translated from Zhurnal Prikladnoi Spektroskopii , 32 (2 ), 336 (1980 ).
3.
Fina
L.
and
Chen
G
, Vibrational Spectrosc. 1 , 353 (1991 ).
4.
Reichert
W. M.
Suci
P. A.
Ives
T.
and
Andrade
J. D
, Appl. Spectrosc. 41 , 503 (1987 ).
5.
Toriumi
M.
Yanagimachi
M.
and
Masuhara
H
, Appl. Opt. 31 , 6376 (1992 ).
6.
Shick
R.
Koenig
J.
and
Ishida
H
, Appl. Spectrosc. 47 , 1237 (1993 ).
7.
Hansen
W.
, J. Opt. Soc. Amer. 58 , 380 (1968 ).
8.
Hirschfeld
T.
, Appl. Spectrosc. 31 , 289 (1977 ).
9.
Tompkins
H. G.
, Appl. Spectrosc. 28 , 335 (1974 ).
10.
Masui
A.
Yamamoto
K.
and
Ohta
K
, Bunseki Kagaku 41 , T49 (1992 ).
11.
Yamamoto
K.
Masui
A.
and
Ishida
H
, Appl. Opt. 33 , 6285 (1994 ).
12.
Yamamoto
K.
Masui
A.
and
Ishida
H
, Spectrochim. Acta 50A , 2079 (1994 ).
13.
Yamamoto
K.
and
Masui
A
, Appl. Spectrosc. 49 , 639 (1995 ).