Abstract
ICP spectroscopy utilizing both gaseous and/or liquid sample introduction was used to model chemical components produced in plasma etch reactors. Single plasma gas chemistries including Ar and CF4 and additive gas systems of CHF3-O2 and CF4-O2 were characterized with the use of a dispersive monochromatoir/photodiode array detection system. Experimental techniques and equipment comparisons of plasma sources and detection systems for plasma chemistry modeling are discussed. Identification of atomic and molecular species produced in each plasma source for these gas chemistries and sample components was determined and compared.
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References
1.
Chapman
B.
, Glow Discharge Processes (John Wiley & Sons , New York , 1980 ).
2.
Marr
G. V.
, Plasma Spectroscopy (Elsevier Publishing Co. , New York , 1968 ).
3.
Fassel
V. A.
, Science 202 , 183 (1978 ).
4.
Barnes
R. M.
, Applications of Plasma Emission Spectroscopy (Heyden Press , Philadelphia , 1979 ).
5.
Barnes
R. M.
, Developments in Atomic Plasma Spectrochemical Analysis (Heyden Press , Philadelphia , 1980 ).
6.
Coburn
J. W.
, Plasma Chem. Plasma Process 2 , 1 (1982 ).
7.
Gise
P. E.
and
Blanchard
R
, Semiconductor and Integrated Circuit Fabrication Techniques (Reston Publishing , Reston, Virginia , 1979 ).
8.
Boenig
H. V.
, Plasma Science (Cornell University Press , Ithaca, New York , 1982 ).
9.
Straughan
B. P.
and
Walker
S
, Spectroscopy (John Wiley & Sons , New York , 1976 ).
10.
Coburn
J. W.
and
Winters
H. F
, J. Vac. Sci. Technol. 16 , 391 (1979 ).
11.
Flamm
D. L.
Donnelly
V. M.
and
Ibbotson
D. E
, J. Vac. Technol. 1B , 23 (1983 ).
12.
Winters
H. F.
Coburn
J. W.
and
Kay
E
, J. Appl. Phys. 48 , 4973 (1977 ).
13.
Coburn
J. W.
, AVS Monograph Series (AVS , San Jose, California , 1982 ).
14.
Harshbarger
W. R.
and
Porter
R. A
, Solid State Technol. 21 (4 ), (1978 ).
15.
Harshbarger
W. R.
Porter
R. A.
Miller
T. A.
and
Norton
P
, Appl. Spectrosc. 31 , 201 (1977 ).
16.
Stafford
W. R.
and
Gorin
G. J
, Solid State Technol. 20 (9 ), 51 (1977 ).
17.
Degenkolb
E. O.
Mogab
C. J.
Goldrick
M. R.
and
Griffiths
J. E
, Appl. Spectrosc. 30 , 520 (1976 ).
18.
Degenkolb
E. O.
and
Griffiths
J. E
, Appl. Spectrosc. 31 , 40 (1977 ).
19.
Harshbarger
W. R.
Porter
R. A.
and
Norton
P
, J. Elect. Mat. 7 , 429 (1978 ).
20.
d'Agostino
R.
Cramarosa
F.
De Benedictis
S.
and
Ferraro
G
, J. Appl. Phys. 52 , 1259 (1981 ).
21.
Coburn
J. W.
and
Chen
M
, J. Appl. Phys. 51 , 3134 (1980 ).
22.
Flamm
D. L.
, Solid State Technol. 22 (4 ), 109 (1979 ).
23.
Frieser
R. G.
and
Nogay
J
, Appl. Spectrosc. 34 , 31 (1980 ).
24.
Keren
H.
Kaufman
Y.
Dothan
F.
and
Avira
P
, J. Appl. Phys. 50 , 7974 (1979 ).
25.
Griffiths
J. E.
and
Degenkolb
E. O
, Appl. Spectrosc. 31 , 134 (1977 ).
26.
Mautz
K. E.
, Ph.D. Dissertation , Arizona State University , Tempe (1987 ).
27.
Mautz
K. E.
, M. S. Thesis , Arizona State University , Tempe (1985 ).
28.
Mautz
K. E.
Parsons
M. L.
and
Moore
C. B
, Appl. Spectrosc. 41 , 219 (1987 ).
29.
Betty
K. R.
and
Horlick
G
, Appl. Spectrosc. 32 , 31 (1978 ).
30.
Talmi
Y.
and
Simpson
R. W
, Appl. Opt. 19 , 1401 (1980 ).
31.
Edmonds
T. E.
and
Horlick
G
, Appl. Spectrosc. 31 , 536 (1977 ).
32.
Hughes
S. K.
Brown
R. M.
Jr.
, and
Fry
R. C.
, Appl. Spectrosc. 35 , 396 (1981 ).
33.
Talmi
Y.
, Appl. Spectrosc. 36 , 1 (1982 ).
34.
Talmi
Y.
, Multichannel Image Detectors ACS Symposium Series 102 (American Chemical Society , Washington, D.C. , 1979 ).
35.
Talmi
Y.
, Multichannel Image Detectors ACS Symposium Series 236 (American Chemical Society , Washington, D.C. , 1983 ), Vol. 2 .
36.
Keane
J. M.
and
Fry
R. C
, Anal. Chem. 58 , 790 (1986 ).
37.
Horlick
G.
, Appl. Spectrosc. 30 , 113 (1976 ).
38.
Fry
R. C.
Northway
S. J.
Brown
R. M.
and
Hughes
S. K
, Anal. Chem. 52 , 1716 (1980 ).
39.
Johnson
D.
, Ind. Res. Dev. 22 (10 ), 181 (1980 ).
40.
Zaidel
A. N.
Prokof'ev
V. K.
Raiskii
S. M.
Slavnyi
V. A.
and
Shreider
E. Y
, Table of Spectral Lines (Plenum Press , New York , 1970 ), 3rd ed.
41.Massachusetts Institute of Technology Wavelength Tables (MIT Press , Cambridge, Massachusetts , 1969 ).
42.Massachusetts Institute of Technology Wavelength Tables (MIT Press , Cambridge, Massachusetts , 1981 ), Vol. 2 .
43.
Kuba
J.
Kucera
L.
Plzak
F.
Ovorak
M.
and
Mraz
J
, Coincidence Tables for Atomic Spectroscopy (Elsevier Publishing Co. , New York , 1965 ).
44.
Hughes
S. K.
and
Fry
R. C
, Appl. Spectrosc. 35 , 493 (1981 ).
45.
Pearse
R. W. B.
and
Gaydon
A. G
, The Identification of Molecular Spectra (Halstead Press , New York , 1976 ).
46.
Herrmann
R.
and
Alkemade
C. T. J
, Chemical Analysis by Flame Photometry (Interscience Publishers , New York , 1963 ).
47.
Northway
S. J.
and
Fry
R. C
, Appl. Spectrosc. 34 , 332 (1980 ).
48.
Meyer
G. A.
and
Thompson
M. D
, Appl. Spectrosc. 40 , 195 (1985 ).
49.
Winge
R. K.
Peterson
V. T.
and
Fassel
V. A
, Appl. Spectrosc. 33 , 206 (1979 ).
50.
Coburn
J. W.
and
Kay
E
, Solid State Technol. 22 (4 ), 117 (1979 ).