Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists

Abstract

Keywords

Emission spectroscopy Surface chemistry Photoresist stripping Plasma chemistry Optical devices Radiometry Integrated manufacturing

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References

Degenkolb

E. O.

Mogab

C. J.

Goldrick

M. R.

and Griffiths

J. E.

, Appl. Spectrosc. 30, 520 (1976).

In addition, the Tegal Corporation, Richmond, CA. has incorporated an optical detector as an integral part of their “Plasmaline 200” plasma dry stripper apparatus. The details of the optical detector are not available to us. By comparison with the results in the present work, the appearance of a substantial tail on the optical signal shown in Fig. 1 of their descriptive brochure suggests, however, that the stripping operation is incomplete.

Griffiths

J. E.

and Degenkolb

E. O.

, Appl. Spectrosc, in press.

Pearse

R. W. B.

and Gaydon

A. G.

, The Identification of Molecular Spectra (Chapman and Hall, Ltd., London, 1965), 3rd Ed., pp. 115, 170.