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Abstract

In the current article an electromechanical-fluidic coupled dynamic model of the microbeam is presented and the electromechanical-fluidic coupled dynamic equations are obtained. Using the KBM method, the non-linear coupled dynamic equations are resolved. The explicit equations of the free vibrating displacements of the microbeam are given. Under free vibration, the equations of the electric field fluctuation and the air pressure fluctuation are also given. Besides this, the forced responses of the electromechanical-fluidic coupled system to voltage excitation are also analysed. Changes in the electromechanical-fluidic coupled vibrations along with mechanical, electric, and fluidic parameters are investigated.

Keywords

dynamics microbeam microelectromechanical systems natural frequency electromechanical-fluidic coupled

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Electromechanical-fluidic coupled dynamics for microbeams

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