The preparation and tribological characteristics of a phosphorylated 3-aminopropyltriethoxysilane self-assembled nanometre film

Abstract

Thin films deposited on a phosphonate 3-aminopropyltriethoxysilane (APTES) self- assembled monolayer (SAM) were prepared on a hydroxylated silicon substrate by self-assembling. The chemical compositions and the chemical state of the film elements were determined by X-ray photoelectron spectrometry. The thickness of the films was determined with an ellipsometer, while the morphologies and nanotribological properties of the samples were analysed by atomic force microscopy. As a result, the target film was obtained. It was also found that the thin films showed the lowest friction and adhesion, followed by APTES—SAM and phosphorylated APTES—SAM, while the silicon substrate showed the highest friction and adhesion. Microscale scratch/wear studies clearly showed that thin films were much more scratch/wear resistant than the other samples.

Keywords

thin films friction adhesion scratch/wear

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References

Microelectromechanical systems: advanced materials and fabrication methods, NMAB-483 (Washington, DC: National Academy Press 1977).

Roukes

, ‘Nanoelectromechanical systems face the future’ Phys. World 14 (2001): 25.

Bhushan

, Tribology issues and opportunities in MEMS (Dordrecht, The Netherlands: Kluwer Academic 1998).

Bhushian

, Handbook of micro/nanotribology (Boca Raton, FL: CRC Press 1999).

Kayali

Lawton

Smith

B. H.

Irwin

L. W.

, ‘MEMS reliability assurance activities at JPL’ EEE Links 5 (1999): 10.

Arney

, ‘Designing for MEMS reliability’ MRS Bull. 26 (2001): 296.

Bhushan

Israelachvili

J. N.

Landmann

, ‘Nanotribology: Friction, lubrication and wear at the atomic-scale’ Nature 374 (1995): 607.

Dugger

M. T.

Senft

D. C.

Nelso

G. C.

Tsukruk

V. V.

Wahl

Ed., Microstructure and microtribology of polymer surfaces 741 (2000): 455 ASC Symposium Series.

Depalma

Tillman

, ‘Friction and wear of self-assembled trichlorosilane monolayer films on silicon’ Langmuir 5 (1989): 868.

10.

Tsukruk

V. V.

Bliznyuk

V. N.

Hazel

Visser

Everson

M. P.

, ‘Organic molecular films under shear forces: Fluid and solid Langmuir monolayers’ Langmuir 12 (1996): 4840.

11.

Boshui

Junxiu

, ‘Lubrication performances of rare earth compounds’ J. Chin. Rare Earth Soc. 16 (1998): 220.

12.

Cha

K. H.

Kim

D. E.

, ‘Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS’ Wear 251 (2001): 1169.

13.

Bhushan

, ‘Nanotribology and nanomechanics’ Wear 259 (2005): 1507.

14.

Buscher

Thomas C.

McBranch

DeQuan

, ‘Understanding the relationship between surface coverage and molecular orientation in polar self-assembled monolayers’ J. Am. Soc. 118 (1996): 2950.

15.

Katz

H. E.

Scheller

Putvinski

T. M.

Schilling

M. L.

Wilson

W. L.

Chidsey

C. E. D.

, ‘Sequence-selective recognition of DNA by strand displacement with a thymine-substituted polyamide’ Science 254 (1991): 1485.

16.

Binnig

Quate

C. F.

Gerber

Ch.

, ‘Design of an atomic force microscope’ Phys. Rev. Lett. 56 (1986): 930.

17.

Glosli

J. N.

McClelland

G. M.

, ‘Molecular-dynamics study of sliding friction of ordered organic monolayers’ Phys. Rev. Lett. 70 (1993): 1960.

18.

Bierbaum

Kinzler

Wöll

Ch.

Gruzne

Hähner

Heid

Effenberger

, A near edge X-ray absorption fine structure spectroscopy and X-ray photoelectron spectroscopy study of the film properties of self-assembled monolayers of organosilanes on oxidized Si(100) Langmuir, 1995, 11, 512.

19.

Israelachvili

J. N.

, Intermolecular and surface forces (New York: Academic Press 1985).