Tribological properties of nanostructured TiO 2 coatings

Abstract

Nanostructured anatase TiO₂ thin films were deposited at 350, 450 and 550°C on crystalline silicon substrates using ultrasonic spray pyrolysis technique. The thickness of the films decreased with increasing temperature whereas roughness and grain size increased. Adhesive strength of the films was found to decrease with substrate temperature. When steel ball (100 Cr6) was used as the counter body, coefficient of friction (CoF) was found to increase with substrate temperature. In the case of films grown at 350°C, when silicon nitride ball were used as the sliding body, the CoF was found to be high. This anomaly is explained on the basis of three body interaction causing large dissipation of energy.