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Abstract

In this paper, a continuous body, electromechanical coupled dynamic model of the micro ring, in an electrical field has been presented and its equations of motion have been given. From the analysis of the system's energy, the electromechanical coupled force has been obtained. The non-linear electromechanical coupled dynamic equations has been linearized and by means of the linear equations, the natural frequencies and vibration modes of the micro ring have been investigated. The dynamic responses of the electrical system and its changes, along with its system parameters have been investigated. These results are useful in the design and manufacture of microelectromechanical systems and can offer some reference for nanomachines.

Keywords

electromechanical coupled dynamics micro ring MEMS natural frequency vibrating modes

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Microelectromechanical coupled dynamics

Abstract

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