Abstract
Abstract
The process strategy for the rapid fabrication of microcomponents made of polymers will be presented. Different fabrication routes have been developed at Forschungszentrum Karlsruhe GmbH within the microsystem technology programme focusig on replication techniques. Single prototypes can be generated by the direct patterning of plastics with excimer laser radiation. For the fabrication of very small series laser-assisted micromachining, neodymium-doped yttrium aluminium garnet (Nd:YAG) and krypton fluorine (KrF) excimer laser radiation allows for the rapid manufacturing of microstructured mould inserts made of plastics, steel, cemented carbide or ceramics. The applied mould insert material depends on the achievable low surface roughness values essential for the subsequent moulding process. Plastic replication such as hot embossing, injection moulding or reaction injection moulding of the generated microstructured mould inserts gives access to mouldings carrying structural details in the micrometre range and/or high aspect ratio microstructures.
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