Abstract
Abstract
The elastic deflection of the sliding bearing interface of machine tools in the tangential direction is important for ultraprecision positioning applications. This study focuses on investigating the magnitude of such tangential elastic deflection through experiments. A nanoprecison linear piezomotor is used to apply tangential force, and capacitance sensors of submicron resolution are used to measure displacements. Experimental results show that the bearing interface features linear elastic characteristics in the tangential direction when the range of tangential displacements is less than 50 nm. When the range is larger than 50nm, the interface only retains a certain amount of tangential deflection in an unloading cycle. The tangential force has a linear relationship with the tangential displacement only in the stage of elastic deformation which is submicron in magnitude.
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