A complex approach based on atomic force microscopy (AFM) is developed to establish influence of nanoscale layer thickness on its elastic, adhesive and frictional properties of polymeric coatings for microelectromechanical systems. Thermoheating element was applied to perform AFM measurements with thermal effects in the temperature range from 20 to 120°C. Friction coefficients at high velocities of sliding and dependences of friction coefficient on the temperature of heated films at low velocities of sliding are defined. This study concludes that the Young's modulus of ultrathin polymeric films on silicon substrate is reduced when thickness or temperature is increased.
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