Hydrogen doped In2O3 (In2O3:H) films show high conductivity, small dispersion of refractive index and very low extinction coefficient in the visible to near infrared wavelengths. The improved properties make this transparent conducting oxide an ideal candidate for a window electrode of optoelectronic devices. This article describes the control of microstructure of In2O3:H, the relationship between the structure and transport properties and the Si based solar cells incorporating the In2O3:H window electrode.
MiyanoT, HashimotoR, KandaY, MiseT, NakadaT: ‘Bifacial CIGS thin film solar cells using high mobility Ti-doped In2O3 back contacts’, Proc. Tech. Digest of 17th Int. Photovoltaic Science and Engineering Conf., Fukuoka, Japan, December 2007, 806–807.
4.
WuX, ZhouJ, DudaA, KeaneJC, GessertTA, YanY, NoufiR: ‘13·9%-efficient CdTe polycrystalline thin-film solar cells with an infrared transmission of ∼50%’, Prog. Photovolt. Res. Appl., 2006, 14, 471–483.
5.
BowersJW, UpadhyayaHM, CalnanS, HashimotoR, NakadaT, TiwariAN: ‘Development of nano-TiO2 dye sensitised solar cells on high mobility transparent conducting oxide thin films’, Prog. Photovolt. Res. Appl., 2008, 17, 265–272.
6.
BerginskiM, HupkesJ, ReetzW, RechB, WuttigM: ‘Recent development on surface-textured ZnO:Al films prepared by sputtering for thin-film solar cell application’, Thin Solid Films, 2008, 516, 5836–5841.
KoidaT, FujiwaraH, KondoM: ‘Hydrogen-doped In2O3 as high-mobility transparent conductive oxide’, Jpn J. Appl. Phys., 2007, 28, L685–L687.
9.
BellinghamJR, PhillipsWA, AdkinsCJ: ‘Intrinsic performance limits in transparent conducting oxides’, J. Mater. Sci. Lett., 1992, 11, 263–265.
10.
ChenM, PeiZL, WangX, YuYH, LiuXH, SunC, WenLS: ‘Intrinsic limit of electrical properties of transparent conductive oxide films’, J. Phys. D: Appl. Phys., 2000, 33, 2538–2548.
11.
EllmerK, MientusR: ‘Carrier transport in polycrystalline transparent conductive oxides: a comparative study of zinc oxide and indium oxide’, Thin Solid Films, 2008, 516, 4620–4627.
LeenheerAJ, PerkinsJD, van HestMFAM, BerryJJ, O'HayreRP, GinleyDS: ‘General mobility and carrier concentration relationship in transparent amorphous indium zinc oxide films’, Phys. Rev. B, 2008, 77B, 115215.
14.
FujiwaraH, KondoM: ‘Effects of carrier concentration on the dielectric function of ZnO:Ga and In2O3:Sn studied by spectroscopic ellipsometry: analysis of free-carrier and band-edge absorption’, Phys. Rev. B, 2005, 71B, 075109.
15.
KoidaT, FujiwaraH, KondoM: ‘Structural and electrical properties of hydrogen-doped In2O3 films fabricated by solid-phase crystallization’, J. Non-Cryst. Solids, 2008, 354, 2805–2808.
16.
KoidaT, KondoM, TsutsumiK, SakaguchiA, SuzukiM, FujiwaraH: ‘Hydrogen-doped In2O3 transparent conducting oxide films prepared by solid-phase crystallization method’, J. Appl. Phys., 2010, 107, 033514.
17.
KoidaT, FujiwaraH, KondoM: ‘Reduction of optical loss in hydrogenated amorphous silicon/crystalline silicon heterojunction solar cells by high-mobility hydrogen-doped In2O3 transparent conductive oxide’, Appl. Phys. Express, 2008, 1, 041501.
18.
KoidaT, SaiH, KondoM: ‘Application of hydrogen-doped In2O3 transparent conductive oxide to thin-film microcrystalline Si solar cells’, Thin Solid Films, 2010, 518, 2930–2933.