Abstract
Indium tin oxide (ITO) films were deposited by ion beam sputtering under various bias voltages. The deposition rate and surface roughness increased with increasing beam voltage. The ITO films showed amorphous structure and were obviously non-stoichiometric. The carrier concentration increased with increasing beam voltage. The conductive electrons of ITO films primarily originated from the oxygen vacancies Vo. The resistivity decreased to a minimum of 3·34 × 10−4 Ω cm at 450 V. The optical transmission in the visible region decreased with increasing beam voltage. Indium tin oxide films with high electron concentration had higher optical energy gap and resulted in blue shift.
Get full access to this article
View all access options for this article.
References
1.
Laux
S.
,
Kaiser
N.
,
Willer
A.
,
Götzelmann
R.
,
Lauth
H.
and
Bernitzki
H.
Thin Solid Films , 1998 , 335 , 1 .
2.
Kaneko
E.
: ‘Liquid crystal TV displays: principles and applications of liquid crystal display’ : 1987 , Tokyo , KTK Scientific .
3.
Dimos
D.
,
Warren
W. L.
,
Sinclair
M. B.
,
Tuttle
B. A.
and
Schwartz
R. W.
J. Appl Phys ., 1994 , 76 , 4305 .
4.
Sreenivas
K.
,
Sudersena-Rao
J.
,
Mansingh
A.
and
Chandra
S.
J. Appl. Phys ., 1985 , 57 , 384 .
5.
Maruyama
T.
and
Fukui
K.
J. Appl. Phys ., 1991 , 70 , 3848 .
6.
Manifacier
J. C.
and
Fillard
J. P.
Thin Solid Films , 1981 , 77 , 67 .
7.
Nath
P.
and
Bunshah
R. F.
Thin Solid Films , 1980 , 69 , 63 .
8.
Kobayashi
H.
,
Ishida
T.
,
Nakamura
K.
,
Nakato
Y.
and
Tsubomura
H.
J. Appl Phys ., 1992 , 72 , 5288 .
9.
Wu
W.
and
Chiou
B.
Appl. Surf Set , 1993 , 68 , 497 .
10.
Meng
L. J.
and
dos Santos
M. P.
Thin Solid Films , 1998 , 322 , 56 .
11.
Kane
S. M.
and
Ahn
K. Y.
J. Vac. Set Technol , 1979 , 16 , (2 ), 171 .
12.
Ohring
M.
: ‘The materials science of thin films’ , 107 –113 ; 1991 , San Diego, CA , Academic Press .
13.
Koski
K.
,
Hölsä
J.
and
Juliet
P.
Thin Solid Films , 1999 , 339 , 240 .
14.
Wang
D.
,
Geyer
U.
,
Schneider
S.
and
Minnigerode
G. V.
Thin Solid Films , 1997 , 292 , 184 .
15.
Kim
Y. J.
and
Kim
H. J.
Mater. Lett ., 1999 , 41 , 159 .
16.
Löbl
H. P.
,
Huppertz
M.
and
Mergel
D.
Surf Coat. Technot , 1996 , 82 , 90 –98 .
17.
Kim
K. H.
,
Park
K. C.
and
Ma
D. Y.
J. AppL Phys ., 1997 , 81 , (12 ), 7764 .
18.
Wu
W. F.
and
Chiou
B. S.
Thin Solid Films , 1994 , 247 , 201 .
19.
Sanon
G.
,
Rup
R.
and
Mansingh
A.
Thin Solid Films , 1990 , 190 , 287 .
20.
Schuler
T.
and
Aegerter
M. A.
Thin Solid Films , 1999 , 351 , 125 .
21.
Igasaki
Y.
and
Saito
H.
Thin Solid Films , 1991 , 199 , 223 .
22.
Kim
H. J.
,
Bae
J. W.
,
Kim
J. S.
,
Kim
K. S.
,
Jang
Y. C.
,
Yeom
G. Y.
and
Lee
N. E.
Thin Solid Films , 2000 , 377-378 , 115 .
23.
El Zawawi
I. K.
and
Abd Alla
R. A.
Thin Solid Films , 1999 , 339 , 314 .
24.
Lin
S. S.
,
Huang
J. L.
and
Lii
D. F.
Surf Coat. Technol , 2004 , 176 , 173 –181 .