Abstract
Three-dimensional finite element method simulation was performed to clarify the mechanism on surface replication in microinjection moulding and thermal nanoimprinting. In particular, the filling flow behaviour into micro- and nanosurface features was discussed in comparison with the experimental results. The simulation results and the experimental results of injection moulding show possibility of the generation of air traps in the filling stage and it is considered that those air traps have a strong relation with replication shape and replication rate. The simulation results of thermal imprinting revealed the penetration behaviour of polymer melt into nanosurface features and showed that the aspect ratio of the surface features and imprinting pressure and temperature influenced flow behaviour in thermal imprinting.
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